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MEMS GAS SENSOR

The USI thermal conductivity gas sensor incorporates advanced design innovations in MEMS (Micro-Electrical-Mechanical-Systems), and was developed and manufactured in Silicon Valley

FEATURES

  • Sensitivity range: 1 100% by volume

  • Leak detection sensitivity in cc/sec 2x10-5 for He, 1x10-4 for CH4, 1x10-4 R12 (dichlorodifluoromethane), and 2x10-4 for Ar.

  • Longer term operational stability

  • Physical contact gas concentration measurement

  • Micro power consumption

  • Miniaturized package form factor

  • Mass market low cost custom packaging

TYPICAL APPLICATIONS

  • Natural gas quality control

  • Combustion control

  • Natural gas engine control

  • Industrial process control

Relative gas thermal conductivity versus temperature

Comparison of catalytic sensor and advanced thermal conductivity sensor

 

 

Table 1: Sensor specification

 

Table 2: Recommended electrical operating condition

 

Table 3: Reference performance characteristics (using general reference measurement circuit)

 

TO5-4 Package

 

General reference measurement circuit

 

Accuracy reference measurement circuit

 




 

 

 

 

 

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